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A new model accurately calculates sorbate concentration in films using refractive index and thickness. This method, validated with water uptake in SU-8 films, reveals two Fickian diffusion processes.

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Area of Science:

  • Materials Science
  • Physical Chemistry
  • Polymer Science

Background:

  • Sorbate uptake and release alter film properties like refractive index and thickness.
  • Accurate quantification of sorbate concentration is crucial for understanding film behavior.

Purpose of the Study:

  • To develop and validate a comprehensive model for calculating sorbate concentration from film refractive index and thickness.
  • To investigate the uptake kinetics of solvents, specifically water, into SU-8 photoresist films.

Main Methods:

  • Utilized Lorentz-Lorenz and Clausius-Mosotti equations to model sorbate partitioning.
  • Employed large-angle interferometric refractometry for film characterization (15-150 μm thickness).
  • Applied Fourier analysis for real-time determination of film thickness and refractive indices.

Main Results:

  • The model successfully correlates average refractive index and film thickness with sorbate mass fraction.
  • Water uptake into SU-8 films exhibited two distinct Fickian diffusion processes.
  • Calculated diffusion coefficients for water in SU-8 were 5.67 × 10⁻⁹ cm²/s and 61.2 × 10⁻⁹ cm²/s.

Conclusions:

  • The developed model provides a quantitative method for determining sorbate concentration in films.
  • The study elucidates the complex diffusion kinetics of water in SU-8 photoresist.
  • Interferometric refractometry coupled with Fourier analysis is effective for dynamic film analysis.