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Updated: Mar 31, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
This study introduces a hybrid extreme ultraviolet (EUV) lithography method combining Talbot and interference techniques. This novel approach allows for the creation of complex nanopatterns by filling arbitrary cell shapes with interference patterns.
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