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Ultra efficient silicon nitride grating coupler with bottom grating reflector.

Jinghui Zou, Yu Yu, Mengyuan Ye

    Optics Express
    |October 20, 2015
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    Summary

    We developed a novel silicon nitride grating coupler using a silicon grating reflector for ultrahigh efficiency and simplified fabrication. This design achieves low coupling loss, improving integrated photonic device performance.

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    Area of Science:

    • Photonics
    • Materials Science
    • Nanotechnology

    Background:

    • Grating couplers (GCs) are essential for interfacing optical fibers with photonic integrated circuits.
    • Traditional designs often rely on complex structures like distributed Bragg reflectors (DBRs) or metal reflectors, increasing fabrication complexity and cost.
    • Improving GC efficiency and simplifying fabrication are key challenges in silicon nitride photonics.

    Purpose of the Study:

    • To theoretically propose and optimize a novel silicon nitride grating coupler.
    • To achieve ultrahigh coupling efficiency with a simplified fabrication process.
    • To investigate the use of a silicon grating reflector (GR) as an alternative to DBRs or metal reflectors.

    Main Methods:

    • Design and simulation of a silicon nitride grating coupler on a silicon grating reflector.
    • Optimization of the silicon grating reflector using a standard silicon-on-insulator (SOI) wafer (220 nm top Si layer).
    • Adjustment of trench width and period length for high reflectivity (>90%).
    • Optimization of the silicon nitride grating coupler (400 nm Si(3)N(4) layer) with a SiO(2) separation layer.
    • Investigation of coupling loss with varying distances between the GC and GR.
    • Theoretical prediction of coupling loss for both uniform and apodized GC structures.

    Main Results:

    • A high reflectivity (>90%) was achieved for the silicon grating reflector.
    • A low coupling loss of -1.47 dB was obtained for a uniform silicon nitride grating coupler.
    • A record ultralow coupling loss of -0.88 dB was predicted for an apodized silicon nitride grating coupler.
    • The silicon grating reflector simplifies fabrication through a single patterning and etching step compared to DBRs.

    Conclusions:

    • The proposed silicon nitride grating coupler with a silicon grating reflector offers a promising solution for high-efficiency and simplified fabrication in photonic integrated circuits.
    • The use of a silicon grating reflector significantly reduces fabrication complexity.
    • The demonstrated performance, including record-low coupling loss, highlights the potential of this approach for advanced photonic applications.