Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO₂ laser welding

We demonstrate fabrication of a microtoroid resonator of a high-quality (high-Q) factor using femtosecond laser three-dimensional (3D) micromachining. A fiber taper is reliably assembled to the microtoroid using CO2 laser welding. Specifically, we achieve a high-Q-factor of 2.12 × 10(6) in the microresonator-fiber assembly by optimizing the contact position between the fiber taper and the microtoroid.