Related Experiment Video
Updated: Mar 31, 2026

10:18
Exfoliation and Analysis of Large-area, Air-Sensitive Two-Dimensional Materials
Published on: January 5, 2019
12.8K
Synthesis of large-area multilayer hexagonal boron nitride for high material performance
Soo Min Kim1,2, Allen Hsu2, Min Ho Park3
1Institute of Advanced Composite Materials, Korea Institute of Science and Technology (KIST), San101 Eunha-Ri, Bongdong-Eup, Wanju-Gun, Jeollabuk-Do 565-902, Korea.
Nature Communications
|October 29, 2015
Summary
Researchers developed large-area multilayer hexagonal boron nitride (h-BN) films using chemical vapor deposition. This advancement enhances two-dimensional semiconductor devices by improving carrier mobility and minimizing substrate interactions.
Area of Science:
- Materials Science
- Nanotechnology
- Condensed Matter Physics
Background:
- Hexagonal boron nitride (h-BN) is a promising gate insulator for 2D electronic devices due to minimal substrate interaction.
- Current synthesis methods limit h-BN applications due to small flake sizes, particularly for multilayer structures.
Purpose of the Study:
- To synthesize large-area multilayer h-BN films using chemical vapor deposition (CVD).
- To evaluate the quality and performance of the synthesized multilayer h-BN in electronic devices.
Main Methods:
- Chemical vapor deposition (CVD) synthesis of multilayer h-BN on Fe foil using a borazine precursor.
- Characterization of h-BN film properties, including cathodoluminescence and mechanical strength (Young's modulus).
- Fabrication and electrical characterization of graphene and MoS2/WSe2 field-effect transistors using the synthesized h-BN.
Main Results:
- Successful synthesis of large-area multilayer h-BN films with high quality, indicated by strong cathodoluminescence and high mechanical strength (1.16 ± 0.1 TPa).
- CVD-grown graphene on multilayer h-BN exhibited significantly higher carrier mobility (∼24,000 cm(2) V(-1) s(-1)) compared to exfoliated h-BN (∼13,000 cm(2) V(-1) s(-1)).
- Integration of h-BN in MoS2 (WSe2) field-effect transistors minimized gate oxide doping and improved mobility by four (150) times.
Conclusions:
- Large-area multilayer h-BN films can be synthesized via CVD, overcoming previous size limitations.
- The synthesized h-BN films are suitable for high-performance 2D electronic devices, enhancing carrier mobility and reducing substrate effects.
- This work paves the way for advanced applications of h-BN in next-generation electronics.

