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Surface microstructure profilometry based on laser confocal feedback.

Weiping Wang1, Shulian Zhang1, Yan Li1

  • 1State Key Laboratory of Precision Measurements, Department of Precision Instruments, Tsinghua University, Beijing 100084, China.

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Summary

This study presents a novel surface microstructure profiling method using confocal technology and laser feedback. It achieves high-resolution, long-range measurements with improved environmental stability.

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Surface Science

Background:

  • Accurate surface microstructure profiling is crucial for material science and engineering.
  • Existing methods often face limitations in range, resolution, or environmental stability.

Purpose of the Study:

  • To develop a high-resolution, large-range surface microstructure profile measurement method.
  • To enhance measurement accuracy and stability under common laboratory conditions.

Main Methods:

  • Utilizing the positioning capability of confocal technology combined with a microchip laser's frequency-shift feedback.
  • Measuring surface profiles by integrating amplitude (for coarse measurement) and phase (for fine measurement) information from reflected feedback light.
  • Implementing a heterodyne phase measurement approach to compensate for environmental disturbances.

Main Results:

  • Achieved a large axial measuring range of tens of microns.
  • Obtained a high axial resolution of approximately 2 nanometers.
  • Demonstrated the method's feasibility by successfully measuring the surface profile of a grating.

Conclusions:

  • The developed method effectively combines confocal technology and laser feedback for precise surface profiling.
  • The integration of amplitude and phase information, along with heterodyne compensation, enables robust and accurate measurements.
  • This technique offers a promising solution for high-performance surface metrology in various scientific and industrial applications.