A simple approach to atom probe sample preparation by using shadow masks
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Updated: Mar 30, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
Published on: October 25, 2019
Peter Felfer1, Ingrid McCarroll1, Chandra Macauley2
1Australian Centre for Microscopy and Microanalysis, The University of Sydney, 2006, Australia.
Abstract:
Here, we present a new method that utilises shadow masks in a broad ion beam system to prepare atom probe samples. It is particularly suited to non-conductors and materials with surface layers such as surface oxides, implanted layers or thin films. This new approach bypasses the focused ion beam (FIB) lift-out step, increasing the sample throughput, dramatically reducing the required FIB beam time and decreasing the complexity of sample preparation.
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