Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

Area of Science:

• Nanotechnology
• Surface Science
• Microscopy

Background:

• Atomic Force Microscopy (AFM) is crucial for nanoscale imaging.
• Existing AFM systems often face limitations in speed and operational range.
• Controlling complex multi-actuator systems for AFM presents significant challenges.

Purpose of the Study:

• To design and control a high-speed and large-range AFM.
• To develop a multi-actuation scheme for enhanced AFM performance.
• To enable real-time visualization of dynamic nanoscale phenomena.

Main Methods:

• A multi-actuation scheme with cooperating nano-positioners was developed.
• A data-based control design methodology was employed for scanner operation.
• The multi-actuated scanner was designed to emulate a single X-Y-Z positioner with superior range and speed.

Main Results:

• The designed AFM scanner comprises five nano-positioners with 6 μm out-of-plane and 120 μm lateral ranges.
• The system achieves high-speed operation with a 20 MHz data throughput.
• Real-time visualization of calcite etching in sulfuric acid revealed layer-by-layer dissolution and pit formation.

Conclusions:

• The proposed multi-actuation scheme effectively achieves high-speed and large-range AFM operation.
• The developed AFM system is suitable for high-resolution imaging and observing dynamic nanoscale processes.
• The study demonstrates the AFM's capability in visualizing chemical etching at the nanoscale.