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Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous

Chen Wang, Qianbo Lu, Jian Bai

    Applied Optics
    |November 13, 2015
    PubMed
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    This study reveals a novel pulse signal in optical microelectromechanical systems (MEMS) displacement sensors, enhancing sensitivity eightfold. Rigorous coupled wavelength analysis (RCWA) optimized parameters for improved device performance and tolerance.

    Area of Science:

    • Optoelectronics
    • Microelectromechanical Systems (MEMS)
    • Nanophotonics

    Background:

    • Optical microelectromechanical systems (MEMS) displacement sensors traditionally rely on sinusoidal signals.
    • Sensitivity limitations in existing MEMS displacement sensors hinder precise nanoscale measurements.

    Purpose of the Study:

    • To investigate the emergence and characteristics of a pulse signal in a highly sensitive lateral deformable optical MEMS displacement sensor.
    • To analyze the factors influencing the pulse signal and optimize the device's performance and tolerance.

    Main Methods:

    • Utilized Wood's anomalies for the optical microelectromechanical systems (MEMS) displacement sensor design.
    • Employed rigorous coupled wavelength analysis (RCWA) to analyze parameter influences (wavelength, period, duty ratio, air gap).

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  • Developed two optimization methods to identify optimal device settings for different incident lights.

    • Main Results:

    • Observed an unexpected pulse signal with an eightfold increase in slope (2.5%/nm) compared to the original sinusoidal signal (0.3%/nm) as the air gap decreased.
    • Identified significant sensitivity of the device to parameters like wavelength, period, duty ratio, and air gap.
    • Simulation results indicate an 85% probability of achieving a slope >0.5%/nm and a 64% probability of achieving a slope between 1.0%/nm and 2.0%/nm in actual devices.

    Conclusions:

    • The novel pulse signal significantly enhances the sensitivity of optical MEMS displacement sensors.
    • Understanding parameter tolerance is crucial for developing reliable and high-performance MEMS devices.
    • RCWA simulations provide valuable guidance for fabricating actual devices with predictable and improved performance.