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J Scott Steckenrider, J Josiah Steckenrider

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    A new phase-extraction method enhances high-resolution moiré analysis using a binary pattern and charge-coupled device (CCD) array. This technique improves surface height mapping accuracy and resolution for detailed topographical analysis.

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    Area of Science:

    • Optical Metrology
    • Surface Analysis
    • 3D Imaging

    Background:

    • Moiré analysis is crucial for high-resolution surface topography.
    • Conventional methods face limitations in phase error and resolution.

    Purpose of the Study:

    • To present an alternative phase-extraction methodology for improved moiré analysis.
    • To enhance the accuracy and resolution of surface height mapping.

    Main Methods:

    • Utilizing a charge-coupled device (CCD) array with specific pixel spacing.
    • Employing a photolithographically printed binary pattern with a 33.3% duty cycle.
    • Implementing telecentric lenses for symmetrical projection and imaging.

    Main Results:

    • Achieved a 33% reduction in phase error compared to conventional methods.
    • Demonstrated the ability to resolve surface features with lateral resolution <50 μm.
    • Attained topographical resolution <10 μm.

    Conclusions:

    • The proposed phase-extraction methodology offers superior performance for high-resolution moiré analysis.
    • This technique provides a significant advancement in surface metrology.
    • The system enables precise characterization of microscale surface features.