Large-stroke convex micromirror actuated by electromagnetic force for optical power control
Optics Express
|November 13, 2015
Summary
Researchers developed a novel micro-electro-mechanical system (MEMS) deformable micromirror for precise focusing-power control. This electromagnetic actuator allows for wide optical power adjustment up to 20 diopters with low energy consumption.
Area of Science:
- Optics and Photonics
- Micro-electro-mechanical Systems (MEMS)
Background:
- Focusing-power control is crucial for tunable optical systems.
- Existing MEMS mirrors have limitations in stroke and power adjustment range.
Purpose of the Study:
- To present a novel MEMS deformable convex micromirror design for advanced focusing-power control.
- To detail the fabrication process and electromagnetic actuation mechanism.
Main Methods:
- Electromagnetic control using repulsive forces between permanent magnets and a coil solenoid.
- Fabrication of a thin, metal-coated polymer-membrane mirror with a 5 mm effective aperture.
- Characterization of mirror displacement and optical power adjustment capabilities.
Main Results:
- Achieved a maximum center displacement of 30.08 µm for large-stroke actuation.
- Demonstrated optical power control across a wide range, up to approximately 20 diopters.
- Low power consumption: maximum 2 W for 20 diopter adjustment at 0.8 A.
Conclusions:
- The novel MEMS micromirror offers a wide focusing-power control range with efficient electromagnetic actuation.
- The design is suitable for integration into miniature tunable optical imaging systems.
- This technology advances MEMS applications in adaptive optics and compact imaging devices.
