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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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High-Temperature SAW Wireless Strain Sensor with Langasite.

Lin Shu1, Bin Peng2, Zhengbing Yang3

  • 1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. s89s89s@126.com.

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|November 17, 2015
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Summary
This summary is machine-generated.

This study developed wireless Surface Acoustic Wave (SAW) sensors for high-temperature strain and temperature measurements. One SAW sensor design demonstrated superior strain sensitivity and accuracy up to 500 °C.

Keywords:
SAW wireless sensorhigh temperaturelangasitestrain

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Acoustics

Background:

  • Surface Acoustic Wave (SAW) resonators are crucial for sensing applications.
  • Langasite substrates offer unique piezoelectric properties for high-temperature operation.
  • Wireless interrogation of SAW sensors enables remote and robust measurements.

Purpose of the Study:

  • To fabricate and characterize wireless SAW sensors on langasite substrates for simultaneous strain and temperature sensing.
  • To investigate the temperature-dependent behavior and strain sensitivity of SAW sensors.
  • To evaluate the measurement accuracy and error sources of the developed sensors.

Main Methods:

  • Fabrication of two SAW resonators on langasite substrates with specific Euler angles.
  • Integration of dipole antennas for wireless interrogation.
  • Experimental measurement of sensor characteristics under varying temperature (20-600 °C) and strain (up to 500 °C) conditions.
  • Extraction of strain-induced frequency shifts from combined temperature and strain effects.

Main Results:

  • Observed distinct temperature behaviors for the two SAW sensor configurations.
  • Demonstrated that strain factors increase with ambient temperature for both sensors.
  • Identified the SAW sensor on the (0°, 138.5°, 117°) cut as more sensitive to strain.
  • Reported relative errors between 0.63% and 2.09%, with hysteresis errors below 5% at 500 °C.

Conclusions:

  • Wireless SAW sensors on langasite are suitable for high-temperature strain and temperature measurements.
  • The (0°, 138.5°, 117°) langasite cut offers enhanced strain sensitivity.
  • The developed sensors exhibit high accuracy and low hysteresis, even at elevated temperatures.