High-frequency and high-quality silicon carbide optomechanical microresonators

Area of Science:

• Materials Science
• Optics
• Mechanical Engineering

Background:

• Silicon carbide (SiC) possesses exceptional material properties suitable for diverse technological applications.
• Optomechanical microresonators are crucial for precise measurements and quantum technologies.

Purpose of the Study:

• To demonstrate the first silicon carbide (SiC) optomechanical microresonators.
• To integrate high mechanical frequency, high mechanical quality, and high optical quality into a single SiC device.

Main Methods:

• Fabrication of SiC microresonators.
• Characterization of mechanical and optical properties.
• Measurement of optomechanical coupling efficiency.

Main Results:

• Achieved a radial-breathing mechanical mode with frequency up to 1.69 GHz.
• Observed a mechanical quality factor (Q) of approximately 5500 in atmosphere.
• Demonstrated a figure of merit (fm·Qm) as high as 9.47 × 10^12 Hz.
• Showcased strong optomechanical coupling for exciting and probing mechanical oscillations.

Conclusions:

• The developed SiC optomechanical microresonators offer a unique combination of high performance.
• Superior thermal and chemical properties of SiC, along with its defect characteristics, make these devices promising for metrology, sensing, and quantum photonics.
• These SiC devices are particularly suitable for applications in harsh environments where other platforms may fail.