Local dynamic range compensation for scanning electron microscope imaging system by sub-blocking multiple peak HE...

Area of Science:

• Microscopy
• Image Processing
• Materials Science

Background:

• Scanning Electron Microscopy (SEM) is crucial for high-resolution imaging.
• Image quality in SEM can be degraded by artifacts like blocking effects.
• Existing histogram equalization methods may not fully address these artifacts.

Purpose of the Study:

• To introduce a novel technique, sub-blocking multiple peak histogram equalization (SUB-B-MPHE) with a convolution operator.
• To improve the image quality of Scanning Electron Microscope (SEM) images.
• To mitigate blocking effects commonly observed in SEM images.

Main Methods:

• Development of the sub-blocking multiple peak histogram equalization (SUB-B-MPHE) technique.
• Integration of a convolution operator within the SUB-B-MPHE framework.
• Application and evaluation of the proposed method on SEM images.

Main Results:

• The modified MPHE technique demonstrates superior performance compared to the original MPHE.
• The sub-blocking method, incorporating a convolution operator, effectively removes blocking effects in SEM images.
• The convolution operator ensures proper pixel value distribution, enhancing overall image clarity.

Conclusions:

• The SUB-B-MPHE technique with a convolution operator significantly improves SEM image quality.
• This novel approach effectively addresses and removes blocking artifacts.
• The proposed method outperforms existing techniques for SEM image enhancement.