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Orientation mapping by transmission-SEM with an on-axis detector.

J J Fundenberger1, E Bouzy1, D Goran2

  • 1Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux (LEM3), UMR CNRS 7239, Université de Lorraine, 57045 Metz, France; Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures (DAMAS), Université de Lorraine, 57045 Metz, France.

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Summary

This study introduces a new scanning electron microscope (SEM) configuration for enhanced orientation mapping of nanocrystalline materials. The improved setup achieves high spatial resolution, revealing details as small as 5nm.

Keywords:
NanostructureOrientation mappingScanning electron microscopySpatial resolutionTransmission Kikuchi diffraction

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Area of Science:

  • Materials Science
  • Microscopy
  • Crystallography

Background:

  • Conventional orientation mapping in scanning electron microscopy (SEM) is crucial for crystalline material characterization.
  • Current limitations in spatial resolution hinder the analysis of ultrafine or nano-grain materials.
  • Increasing resolution requires collecting transmission diffraction patterns within the SEM.

Purpose of the Study:

  • To develop an improved SEM configuration for high-resolution orientation mapping.
  • To overcome drawbacks associated with previous off-axis detector arrangements.
  • To enable detailed characterization of nanocrystalline materials.

Main Methods:

  • A novel SEM configuration was designed with the scintillator positioned beneath the thin foil on the optical axis.
  • Light is reflected towards the camera using a mirror.
  • Transmission diffraction patterns are collected at low probe currents.

Main Results:

  • The new configuration yields intense diffraction patterns even at very low probe currents.
  • Example orientation maps demonstrate the capability to resolve details approximately 5nm in size.
  • The method offers high spatial resolution suitable for nanocrystalline materials.

Conclusions:

  • The proposed SEM configuration offers enhanced spatial resolution for orientation mapping.
  • Its geometric simplicity and effectiveness at low probe currents are advantageous.
  • This advancement opens new avenues for characterizing nanocrystalline materials with greater detail.