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Mass Analyzers: Common Types01:19

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The quadrupole mass analyzer consists of four cylindrical metal rods arranged in a diamond carrying a DC voltage and a radio-frequency AC voltage. The motion of ions through the quadrupole depends on the field strength, causing only ions of a certain m/z to resonate successfully and strike the detector at a given field strength. Though the transmission rate for these analyzers is high, the exact elemental composition of the sample is not determined because of low resolution; however, they are...
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The mass analyzer is a crucial component of the mass spectrometer. In the ionization chamber, the vaporized sample is bombarded with a high-energy electron beam to generate a radical cation and further fragment into neutral molecules, radicals, and cations. A series of negatively charged accelerator plates accelerate the cations into the mass analyzer. The mass analyzer separates ions according to their mass-to-charge (m/z) ratios and then directs them to the detector. The common types of mass...
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Inductively coupled plasma (ICP) is the common plasma source used in atomic emission spectroscopy (AES), a technique that detects and analyzes various elements in a sample. This method is often called inductively coupled plasma atomic emission spectroscopy (ICP-AES).
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Ion angle distribution measurement with a planar retarding field analyzer.

Shailesh Sharma1, David Gahan2, Paul Scullin2

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A novel planar retarding field analyzer technique precisely measures plasma ion angular distribution. This method controls ion angular spread for accurate substrate bombardment analysis, enabling detailed ion energy distribution studies.

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Area of Science:

  • Plasma Physics
  • Surface Science
  • Analytical Instrumentation

Background:

  • Understanding plasma-ion interactions with surfaces is crucial for materials processing and device fabrication.
  • Accurate measurement of ion angular distribution is essential for controlling surface modification.
  • Existing techniques may lack the precision or adaptability for detailed angular analysis.

Purpose of the Study:

  • To introduce a new technique for measuring the angular distribution of plasma ions bombarding a substrate.
  • To develop and validate an analytical theory for quantifying ion current based on incident angle and apparatus geometry.
  • To demonstrate the capability of measuring ion energy distributions as a function of ion angle with high resolution.

Main Methods:

  • Utilized a planar retarding field analyzer with a variable effective aperture aspect ratio.
  • Developed analytical theory relating ion current to incident angle, ion energy, aperture geometry, and aspect ratio.
  • Derived mathematical theory and discussed numerical solutions for data interpretation.

Main Results:

  • Successfully controlled the angular spread of ions detected by varying the analyzer's aperture aspect ratio.
  • Presented a theoretical framework to define ion current as a function of multiple parameters.
  • Achieved measurement resolution as low as 3° for ion energy distributions versus ion angle.

Conclusions:

  • The presented technique offers a precise method for analyzing plasma ion angular distributions.
  • The developed analytical theory provides a robust foundation for interpreting measurement data.
  • This advancement facilitates detailed characterization of ion-substrate interactions, crucial for plasma-based technologies.