Development of a novel nanoindentation technique by utilizing a dual-probe AFM system

Area of Science:

• Materials Science
• Nanotechnology
• Mechanical Engineering

Background:

• Conventional atomic force microscopy (AFM) systems face limitations in resolution and depth sensing for nanoindentation.
• Existing nanoindentation techniques often rely on beam-bounce technology, which can limit precision.

Purpose of the Study:

• To introduce a novel instrumentation approach for nanoindentation using a multi-probe scanning probe microscopy (SPM) tool.
• To enhance resolution and depth sensing capabilities in nanoindentation experiments.
• To accurately characterize the mechanical properties of materials at the nanoscale.

Main Methods:

• Utilized a multi-probe SPM tool incorporating tuning-fork based probes for both indentation and depth sensing.
• Implemented a second ultra-high resolution probe system dedicated to precise vertical movement measurement of the indenter.
• Applied the technique to materials including silicon, fused silica, and Corning Eagle Glass.

Main Results:

• Demonstrated improved resolution and depth sensing compared to conventional AFM nanoindentation.
• Successfully characterized the mechanical properties of silicon, fused silica, and Corning Eagle Glass with high accuracy.
• Validated the viability of the new approach for precise nanomechanical characterization.

Conclusions:

• The novel multi-probe SPM approach offers a significant advancement in nanoindentation technology.
• This technique provides high accuracy in characterizing material mechanical properties.
• The method opens new avenues for nanomechanical characterization and related applications.