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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Yangyang Wang1, Ruo Xi Yang2, Ruge Quhe3
1State Key Laboratory for Mesoscopic Physics and Department of Physics, Peking University, Beijing 100871, P. R. China. jinglu@pku.edu.cn and Department of Nuclear Science and Engineering and Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Achieving low-resistance metal contacts is crucial for two-dimensional WSe2 devices. This study reveals that Platinum (Pt) contacts, with spin-orbital coupling (SOC) effects, enable p-type ohmic contacts, overcoming previous limitations.
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