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Updated: Mar 28, 2026

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Low kappa, narrow bandwidth Si(3)N(4) Bragg gratings
Optics Express
|December 25, 2015
Summary
We developed three low perturbation grating designs for narrower linewidths in semiconductor lasers. These gratings, compatible with DUV lithography, enable kHz level linewidths on a monolithic platform.
Area of Science:
- Photonics and Optical Engineering
- Semiconductor Device Physics
Background:
- Achieving narrow linewidths in semiconductor lasers is crucial for applications like optical communications and spectroscopy.
- Low perturbation gratings are essential for controlling light-matter interactions and enhancing laser performance.
Purpose of the Study:
- To investigate and compare three distinct low perturbation grating designs (post, sampled, and high order) for their effectiveness in reducing linewidths.
- To assess the compatibility of these grating designs with Deep Ultraviolet (DUV) lithography.
Main Methods:
- Fabrication of three grating designs on 90 nm thick silicon nitride (Si3N4) strip waveguides.
- Characterization using reflection and transmission spectra measurements to determine coupling constants and Full Width at Half Maximum (FWHM).
Main Results:
- Demonstrated coupling constant (kappa) values ranging from 0.23 cm⁻¹ to 1.2 cm⁻¹.
- Achieved Full Width at Half Maximum (FWHM) linewidths between 74 pm and 116 pm.
- Analyzed tradeoffs between grating geometries regarding linewidth, apodization, and waveguide layout.
Conclusions:
- The investigated low perturbation grating designs are DUV lithography compatible.
- These designs facilitate the creation of long cavity single mode lasers with potential for kHz level linewidths on a monolithic platform.

