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Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window
Optics Express
|December 25, 2015
Summary
A new 6N-5 phase shifting algorithm precisely measures transparent plate surface shape and optical thickness. This method suppresses coupling errors and phase shift errors for improved accuracy in optical metrology.
Area of Science:
- Optical Metrology
- Fourier Optics
Background:
- Accurate measurement of surface shape and optical thickness is crucial for transparent materials.
- Existing phase shifting algorithms can suffer from coupling errors and phase shift inaccuracies.
Purpose of the Study:
- To develop and validate a novel 6N-5 phase shifting algorithm for simultaneous surface shape and optical thickness measurement.
- To suppress coupling errors between higher harmonics and phase shift errors in optical measurements.
Main Methods:
- Development of a 6N-5 phase shifting algorithm incorporating a polynomial window function and discrete Fourier transform.
- Analysis of algorithm characteristics via Fourier representation in the frequency domain.
- Comparison of phase error with existing algorithms.
Main Results:
- The 6N-5 algorithm effectively suppresses coupling errors and phase shift errors.
- Demonstrated simultaneous measurement of surface shape and optical thickness of a transparent plate.
- The algorithm's performance was validated using a wavelength tuning interferometer.
Conclusions:
- The 6N-5 phase shifting algorithm offers a robust solution for simultaneous optical metrology.
- This method provides enhanced accuracy by mitigating common error sources in phase shifting interferometry.
