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Updated: Mar 28, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
Self-Shadowing Deposited Pure Metal Nanohelix Arrays and SERS Application
Yi-Jun Jen1, San Chan2, Jyong-Wei Huang3
1Department of Electro-Optical Engineering, National Taipei University of Technology, 10608 No. 1, Sec. 3, Chung-Hsiao E. Rd, Taipei, Taiwan. jyjun@ntut.edu.tw.
Abstract:
In this work, one-step glancing angle deposition is utilized to fabricate gold and silver nanohelix arrays (NHAs) on smooth glass substrates. During deposition, the substrate is cooled using liquid nitrogen and rotated with a tunable spin rate. The substrate spin rate is tuned to match the deposition rate to yield a spiral-like helix structure. The morphologies and optical properties of spiral-like Ag and Au NHAs are measured and compared. The polarization-dependent reflectance of Au NHA leads to a strong g-factor. The three-dimensional nanohelical structures are demonstrated to be a highly sensitive surface-enhanced Raman scattering (SERS) substrate.
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