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Binary pseudo-random patterned structures for modulation transfer function calibration and resolution

V V Yashchuk1, P J Fischer2, E R Chan1

  • 1Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.

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|January 3, 2016
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Summary

This study introduces a new modulation transfer function (MTF) calibration method using binary pseudo-random (BPR) sequences. This technique offers direct MTF determination and resolution characterization for diverse metrology instruments.

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Area of Science:

  • Metrology and Instrumentation
  • Optical and X-ray Microscopy
  • Spatial Frequency Domain Analysis

Background:

  • Accurate characterization of metrology instrumentation is crucial for reliable scientific measurements.
  • Existing methods for modulation transfer function (MTF) determination can be complex and limited in scope.
  • The spatial frequency domain provides essential information about an instrument's resolution and performance.

Purpose of the Study:

  • To present a novel MTF calibration method using binary pseudo-random (BPR) sequences and arrays.
  • To demonstrate the method's effectiveness for spectral characterization in the spatial frequency domain.
  • To validate the universality and applicability of the BPR-based method across various metrology instruments.

Main Methods:

  • Utilized one-dimensional (1D) and two-dimensional (2D) binary pseudo-random (BPR) gratings and arrays.
  • Leveraged the white-noise-like power spectral density of BPR patterns for direct MTF determination.
  • Applied the method to a transmission soft x-ray microscope using a BPR multilayer (ML) test sample (2.8 nm layer thickness).

Main Results:

  • Achieved direct MTF determination with uniform sensitivity across the spatial frequency range and field of view.
  • Successfully performed MTF calibration and resolution characterization over the full field of a soft x-ray microscope.
  • Demonstrated that BPRML sample tests can aid in fine-tuning instrument focal distance.

Conclusions:

  • The BPR-based method provides a universal and effective approach for MTF calibration and spectral characterization.
  • The technique is applicable to a wide array of metrology instrumentation, from nanometers to millimeters.
  • This method enhances instrument performance assessment and facilitates precise focal adjustments.