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Liquid-Phase Beam Pen Lithography.

Shu He1, Zhuang Xie1, Daniel J Park1

  • 1Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA.

Small (Weinheim an Der Bergstrasse, Germany)
|January 9, 2016
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Summary
This summary is machine-generated.

Liquid phase beam pen lithography (BPL) enables precise nanoscale patterning. This study explores BPL parameters for synthesizing nucleotide nanoarrays, demonstrating its potential for localized photochemical reactions in liquid media.

Keywords:
beam pen lithographylithographynucleotide nanoarraysphotochemistryphotolithographyscanning probe lithography

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Area of Science:

  • Nanofabrication and Nanotechnology
  • Photochemistry
  • Materials Science

Background:

  • Beam pen lithography (BPL) is a high-resolution patterning technique.
  • Existing BPL methods are often limited to vacuum or dry conditions.
  • Localized photochemical reactions in liquid media are crucial for various applications.

Purpose of the Study:

  • To evaluate the feasibility and performance of liquid phase beam pen lithography (BPL).
  • To investigate the impact of key parameters, such as tip-substrate gap and aperture size, on patterning.
  • To demonstrate the application of liquid phase BPL for synthesizing complex nanostructures.

Main Methods:

  • Systematic investigation of tip-substrate gap and aperture size effects in liquid phase BPL.
  • Utilized an organic medium for the lithography process.
  • Proof-of-concept experiment involving the synthesis of nanoarrays.

Main Results:

  • Demonstrated successful nanoscale patterning using BPL in an organic liquid medium.
  • Established the influence of tip-substrate gap and aperture size on patterning resolution and fidelity.
  • Successfully synthesized nanoarrays of nucleotides as a proof of concept.

Conclusions:

  • Liquid phase BPL is a viable technique for high-resolution patterning in a liquid environment.
  • The study highlights the potential of BPL for localized photochemical reactions requiring liquid media.
  • This approach opens new avenues for nanoscale synthesis and functionalization in solution.