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Updated: Mar 26, 2026

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments
Published on: June 27, 2022
An improved preparation method for cross-sectional TEM specimens of films deposited on metallic substrates
Bingyang Ma1, Kaicheng Shi1, Hailong Shang1,2
1State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200240, People's Republic of China.
Abstract:
Cross-sectional TEM analysis is one of the most important techniques to characterize microstructures of films. However, the complex process, low efficiency, and low success rate of specimen preparation limit its application. This paper analyzed the main causes of low success rate and proposed an improved method for specimen preparation of films deposited on metallic substrates. This method consisting of twin-jet electropolishing and one-sided rocking ion milling is high in efficiency and success rate.
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Preparation of Samples for Electron Microscopy
Fixation and Sectioning
The simplest type of preparation is the wet mount, in which the specimen is placed in a drop of liquid on the slide. A liquid specimen can be directly deposited on the slide using a dropper. Solid specimens, such as skin scraping, can be placed on the slide before adding a drop of liquid to prepare the wet mount. Sometimes the liquid is simply water, but stains are often added...