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Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity.
Jiahao Guo1, Pengcheng Hu2, Jiubin Tan3
1Department of Automation Measurement and Control Engineering, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. gwojaho@gmail.com.
Sensors (Basel, Switzerland)
|January 26, 2016
Summary
This study presents a novel segmented annular coplanar capacitor model. Optimized sensor designs achieve high sensitivity for precise tilt measurements.
Area of Science:
- Electrical Engineering
- Applied Physics
- Sensor Technology
Background:
- Capacitive sensors are crucial for precise angle measurements.
- Segmented annular coplanar capacitors offer unique design possibilities.
- Optimizing sensor geometry is key to enhancing performance.
Purpose of the Study:
- To develop a theoretical model for a segmented annular coplanar capacitor.
- To derive a mathematical expression for its capacitance.
- To analyze and optimize the structure for a capacitive tilt sensor.
Main Methods:
- Solving Laplace's equation with Hankel transform for analytical capacitance derivation.
- Utilizing the finite element method for result verification.
- Fabricating and testing three sensor models with varying electrode-gap positions.
Main Results:
- A validated analytical model for capacitance calculation.
- Identification of key structural parameters influencing capacitance.
- Demonstration of a high-sensitivity capacitive tilt sensor (0.129 pF/°).
Conclusions:
- The optimized sensor design achieves high sensitivity and low non-linearity (<0.4% FS).
- The theoretical model provides a foundation for practical capacitive sensor design.
- This research offers versatile solutions for diverse measurement applications.
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