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Updated: Mar 26, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Yin Huang1, Longju Liu, Michael Johnson
1Department of Electrical and Computer Engineering, Iowa State University, Ames, IA 50011, USA.
A novel sol-gel imprint lithography technique enables single-step fabrication of guided-mode resonance (GMR) structures. This cost-effective method produces submicron gratings for optical devices and demonstrates high sensitivity for refractometric sensing applications.
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