Efficient analysis of deep high-index-contrast gratings under arbitrary illumination

An efficient method for computing the problem of an electromagnetic beam transmission through deep periodic dielectric gratings is presented. In this method the beam is decomposed into a spectrum of plane waves, transmission coefficients corresponding to each such plane wave are found via Rigorous Coupled Wave Analysis, and the transmitted beam is calculated via inverse Fourier integral. To make the approach efficient for deep gratings the fast variations of the transmission coefficients versus spatial frequency are accounted for analytically by casting the summations and integrals in a form that has explicit rapidly varying exponential terms. The resulting formulation allows computing the transmitted beam with a small number of samples independent of the grating depth.