Electrostatically tunable plasmonic devices fabricated on multi-photon polymerized three-dimensional microsprings

Electrostatically tunable plasmonic devices on three-dimensional (3D) microsprings were fabricated using multi-photon polymerization followed by metal deposition. These plasmonic devices comprised a nanostructured Au microplate and two 3D microsprings. The maximum plasmon excitation efficiency was 35%, a value achieved with incident light of wavelength 632.8 nm. The efficiency could be continuously changed from almost zero to maximum by inclining the microplates with the application of DC voltage up to 50 V. Such dynamic functionality is useful for the realization of highly integrated optoelectronic devices and tunable metamaterials.