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Simultaneous multi-channel absolute position alignment by multi-order grating interferometry.

Zhang Tao, Jiwen Cui, Jiubin Tan

|February 3, 2016

Summary

This summary is machine-generated.

This study introduces a multi-channel absolute position alignment system for precise grating mark positioning. It achieves stable, accurate measurements by combining low and high-order grating interferometer signals, paving the way for industrial applications.

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Area of Science:

Metrology
Optical Engineering
Precision Measurement

Background:

Accurate absolute position determination is crucial for industrial automation and scientific instrumentation.
Existing systems often face limitations in range, accuracy, or stability.
Grating interferometry offers a promising approach for high-resolution position sensing.

Purpose of the Study:

To develop and investigate a simultaneous multi-channel absolute position alignment system.
To determine the absolute position of a grating mark with enhanced stability and accuracy.
To enable a new class of absolute position alignment systems for industrial applications.

Main Methods:

Utilizing a multi-order grating interferometer for simultaneous measurements.
Employing a multi-channel phase extraction method for robust data processing.
Combining measurement results from different grating orders to leverage their respective strengths.

Main Results:

Achieved stable and consistent measurement results through simultaneous data acquisition.
Successfully combined low-order signals for large unambiguous measurement ranges.
Enhanced measurement accuracy by integrating high-order grating signals.
Experimental validation using a HeNe reference interferometer showed standard deviations below 11.48nm.

Conclusions:

The proposed multi-channel system effectively determines absolute grating mark positions.
The combined use of different grating orders optimizes both measurement range and accuracy.
This technology holds significant potential for advancing industrial precision alignment systems.