Propagation of Uncertainty from Systematic Error
Interference and Diffraction
Propagation of Uncertainty from Random Error
Distance Corrections
Calibration Curves: Correlation Coefficient
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The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
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Windowed phase-shifting algorithms can improve surface shape measurements in multilayer interferometry. The 4N-3 algorithm minimizes correlated errors and offers the best repeatability for lithium niobate wafer analysis.
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