Transparent capacitors with hybrid ZnO:Al and Ag nanowires as electrodes

Transparent conducting films with a composite structure of AlZnO-Ag nanowires (AgNWs) have been prepared by atomic layer deposition. The sheet resistance was reduced from 120 to 9 Ω when the AgNW networks were involved. Transparent capacitors with Al2O3-TiO2-Al2O3 dielectrics were fabricated on the composite electrodes and demonstrated a capacitance density of 10.1 fF μm(-2), which was significantly higher than that of capacitors with AlZnO electrodes (8.8 fF μm(-1)). The capacitance density remained almost unchanged in a broad frequency range from 3 kHz to 1 MHz. Moreover, a low leakage current density of 2.4 × 10(-7) A cm(-2) at 1 V was achieved. Transparent and flexible capacitors were also fabricated using the composite electrodes, and demonstrated an improved bendability. The transparent capacitors showed an average optical transmittance over 70% in the visible range, and thus open the door to practical applications in transparent integrated circuits.