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Updated: Mar 25, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Katsuhiko Ariga1, Kosuke Minami1, Lok Kumar Shrestha1
1World Premier International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan. ARIGA.Katsuhiko@nims.go.jp.
This review explores nanoarchitectonics for sensor design, focusing on carbon-based materials. It details inside, outside, and hierarchic nanoarchitectonics for advanced functional materials.
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