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Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
D Carta1, A P Hitchcock2, P Guttmann3
1Nano Group, Nanofabrication Centre, Electronics and Computer Science, Faculty of Physical Sciences and Engineering, University of Southampton, United Kingdom.
Scientific Reports
|February 20, 2016
Summary
Researchers identified reduced titanium oxide (TiOx) phases in memristive devices, crucial for resistive switching. This finding clarifies conductive pathways in solid-state memory, advancing device understanding.
Area of Science:
- Materials Science
- Solid-State Physics
- Nanotechnology
Background:
- Resistive switching in solid-state memory devices relies on forming conductive phases in metal-oxide thin films.
- Quantifying these conductive regions in multi-phase materials like TiOx is challenging.
- Understanding these phases is key to optimizing memristive device performance.
Purpose of the Study:
- To spatially resolve and chemically characterize distinct TiOx phases in memristive devices.
- To investigate the role of phase reduction in enabling electrical conductivity and resistive switching.
- To provide a quantitative method for analyzing morphological and chemical changes in such devices.
Main Methods:
- Combining full-field transmission X-ray microscopy with soft X-ray spectroscopy.
- Analyzing lamella samples of TiOx-based memristive devices.
- Correlating electrical states with localized chemical and structural changes.
Main Results:
- Identified reduced disordered TiOx phases (O/Ti ratio ~1.37) forming conductive pathways (~100 nm).
- Observed crystalline rutile and orthorhombic-like TiO2 phases near the reduced area.
- Inferred local temperature increases up to 1000 K, supporting Joule heating in resistive switching.
Conclusions:
- The study quantitatively maps conductive TiOx phases responsible for memristive switching.
- It confirms the role of Joule heating and phase reduction in device operation.
- The developed X-ray microscopy and spectroscopy approach offers a robust alternative to conventional electron microscopy for analyzing such materials.
