Related Experiment Video
Updated: Mar 25, 2026
13:49
High-resolution Fiber-optic Microendoscopy for in situ Cellular Imaging
Published on: January 11, 2011
35.3K
Electrothermal MEMS fiber scanner for optical endomicroscopy
Optics Express
|February 25, 2016
Summary
We developed a novel microelectromechanical systems (MEMS) fiber scanner using an electrothermal silicon microactuator. This device achieves Lissajous scanning for potential laser scanning endomicroscopy applications.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Optical Engineering
- Biomedical Devices
Background:
- Laser scanning microscopy enables high-resolution imaging within biological tissues.
- Miniaturization of scanning components is crucial for developing minimally invasive endoscopic tools.
Purpose of the Study:
- To report a novel MEMS fiber scanner with an electrothermal silicon microactuator.
- To demonstrate Lissajous scanning capabilities for endomicroscopic applications.
Main Methods:
- Fabrication of a MEMS device with double hot/cold arm structures and a silicon fiber groove.
- Direct mounting of an optical fiber onto the microactuator.
- Characterization of resonant scanning frequencies and scanned area under electrical stimulation.
Main Results:
- The microactuator footprint is 1.28 x 7 x 0.44 mm³.
- Resonant frequencies were measured at 239.4 Hz (lateral) and 218.4 Hz (vertical) for a 20 mm optical fiber.
- A scanned area of 451 μm x 558 μm was achieved with a 16 Vpp pulse train.
Conclusions:
- The novel MEMS fiber scanner successfully separates resonant frequencies for Lissajous scanning.
- This technology offers significant potential for advancing laser scanning endomicroscopy.
