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Related Experiment Video

Updated: Mar 25, 2026

Digital Inline Holographic Microscopy DIHM of Weakly-scattering Subjects

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Published on: February 8, 2014

Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization.

Jing Qin¹, Richard M Silver¹, Bryan M Barnes¹

¹Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Dr. MS 8212, Gaithersburg, MD USA 20899-8212.

Light, Science & Applications

|March 1, 2016

Summary

This summary is machine-generated.

This study presents a novel optical measurement technique for precisely quantifying nanoscale structures. The method achieves sub-nanometer accuracy for features smaller than the wavelength of light, crucial for nanoelectronic devices.

Keywords:

computational microscopy light scattering metrology quantitative nanoscale microscopy sub-nanometer uncertainties

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Area of Science:

Optical Metrology
Nanotechnology
Solid State Physics

Background:

Accurate measurement of sub-wavelength nanometric structures is a significant challenge.
Existing methods often lack the required precision for atomic-scale details.

Purpose of the Study:

To develop a quantitative optical measurement approach for 3D nanometric structures.
To achieve sub-nanometer sensitivity for features smaller than 1/30th of the wavelength.

Main Methods:

Utilized a Fourier domain normalization approach within Fourier optical imaging code.
Simulated the full 3D scattered light field for 15 nm structures.
Accurately replicated the light field as a function of focus position.

Main Results:

Successfully fitted nanometer-scale details, including a 2 nm conformal oxide and topography.
Measured densely packed structures closer than the Rayleigh resolution limit.
Achieved sub-nanometer parametric uncertainties for feature sizes.

Conclusions:

The developed method enables practical measurement sensitivity to atomic-scale variations.
Broad applications in measuring nanometric structures and nanoelectronic devices.
Offers high throughput optical configuration for nanoscale metrology.