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Updated: May 17, 2026

A System to Create Stable Nanoparticle Aerosols from Nanopowders
Published on: July 26, 2016
Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum
Dongbin Kim1, Jihun Mun1, HyeongU Kim2
1Vacuum Center, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Daejeon, South Korea.
Abstract:
A particle characteristics diagnosis system (PCDS) was developed to measure nano-sized particle properties by a combination of particle beam mass spectrometry, scanning electron microscopy (SEM), and energy dispersive x-ray spectroscopy (EDS). It allows us to measure the size distributions of nano-sized particles in real time, and the shape and composition can be determined by in situ SEM imaging and EDS scanning. PCDS was calibrated by measuring the size-classified nano-sized NaCl particles generated using an aqueous solution of NaCl by an atomizer. After the calibration, the characteristics of nano-sized particles sampled from the exhaust line of the plasma-enhanced chemical vapor deposition process were determined using PCDS.
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