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Area of Science:

  • Analytical Chemistry
  • Materials Science
  • Chemical Engineering

Background:

  • In situ infrared spectroscopy is crucial for understanding chemical reactions.
  • Existing microfluidic devices have limitations in temperature and pressure ranges for studying catalytic processes.
  • Interference fringes can degrade spectroscopic data quality.

Purpose of the Study:

  • To report anodically bonded etched silicon microfluidic devices for infrared spectroscopic measurements.
  • To enable spatially well-resolved in situ infrared measurements at elevated temperatures and pressures.
  • To present a data processing technique for mitigating interference fringes.

Main Methods:

  • Fabrication of anodically bonded etched silicon microfluidic devices.
  • Performing infrared spectroscopic measurements under various temperature and pressure conditions.
  • Developing and applying a data processing technique to correct for interference fringes.

Main Results:

  • The developed microfluidic devices successfully allowed infrared spectroscopic measurement of solutions.
  • Measurements were extended to higher temperatures and pressures than previously achievable.
  • The data processing technique effectively mitigated interference fringes, improving data quality.

Conclusions:

  • Anodically bonded etched silicon microfluidic devices offer enhanced capabilities for in situ infrared spectroscopy.
  • These devices facilitate time-resolved measurements of realistic catalytic processes under demanding conditions.
  • The reported data processing method is essential for accurate spectroscopic analysis in these devices.