Towards microfluidic reactors for in situ synchrotron infrared studies.

Area of Science:

• Analytical Chemistry
• Materials Science
• Chemical Engineering

Background:

• In situ infrared spectroscopy is crucial for understanding chemical reactions.
• Existing microfluidic devices have limitations in temperature and pressure ranges for studying catalytic processes.
• Interference fringes can degrade spectroscopic data quality.

Purpose of the Study:

• To report anodically bonded etched silicon microfluidic devices for infrared spectroscopic measurements.
• To enable spatially well-resolved in situ infrared measurements at elevated temperatures and pressures.
• To present a data processing technique for mitigating interference fringes.

Main Methods:

• Fabrication of anodically bonded etched silicon microfluidic devices.
• Performing infrared spectroscopic measurements under various temperature and pressure conditions.
• Developing and applying a data processing technique to correct for interference fringes.

Main Results:

• The developed microfluidic devices successfully allowed infrared spectroscopic measurement of solutions.
• Measurements were extended to higher temperatures and pressures than previously achievable.
• The data processing technique effectively mitigated interference fringes, improving data quality.

Conclusions:

• Anodically bonded etched silicon microfluidic devices offer enhanced capabilities for in situ infrared spectroscopy.
• These devices facilitate time-resolved measurements of realistic catalytic processes under demanding conditions.
• The reported data processing method is essential for accurate spectroscopic analysis in these devices.