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Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma

Dass Sudhir1, M Bandyopadhyay1, A Chakraborty1

  • 1ITER-India, Institute for Plasma Research, A-29 GIDC, Sec-25, Gandhinagar, 382016 Gujarat, India.

The Review of Scientific Instruments
|March 3, 2016
PubMed

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