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Updated: Mar 24, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Microwave frequency sweep interferometer for plasma density measurements in ECR ion sources: Design and preliminary
Giuseppe Torrisi1, David Mascali1, Lorenzo Neri1
1INFN - Laboratori Nazionali del Sud, Via S. Sofia 62, 95125 Catania, Italy.
Abstract:
The Electron Cyclotron Resonance Ion Sources (ECRISs) development is strictly related to the availability of new diagnostic tools, as the existing ones are not adequate to such compact machines and to their plasma characteristics. Microwave interferometry is a non-invasive method for plasma diagnostics and represents the best candidate for plasma density measurement in hostile environment. Interferometry in ECRISs is a challenging task mainly due to their compact size. The typical density of ECR plasmas is in the range 10(11)-10(13) cm(-3) and it needs a probing beam wavelength of the order of few centimetres, comparable to the chamber radius. The paper describes the design of a microwave interferometer developed at the LNS-INFN laboratories based on the so-called "frequency sweep" method to filter out the multipath contribution in the detected signals. The measurement technique and the preliminary results (calibration) obtained during the experimental tests will be presented.
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