Extraction characteristics of a low-energy ion beam system with a remote plasma chamber

Low-energy argon beams were extracted from a dual-chamber ion source system. The first chamber is a quartz cylinder where dense inductively coupled plasmas were produced using 13.56 MHz radio frequency (rf) power. The discharge was driven into an adjacent chamber which acts as a reservoir for ion beam extraction using a dual-electrode extractor configuration. Extraction of ions from the second chamber with energies in the 100 eV range was achieved while minimizing fluctuations induced by the rf signal. A custom-built retarding potential analyzer was used to analyze the effectiveness of ion beam transport using the remote plasma chamber. Well-defined beams were extracted between 60 and 100 V extraction potentials at 50-100 W rf powers. An increase in rf power resulted in an increase in average ion energy, increase in ion current density while the energy spread remains constant.