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Updated: Mar 24, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Alex von Diezmann1, Maurice Y Lee2, Matthew D Lew3
1Department of Chemistry, Stanford University, Stanford, California 94305, USA.
Accurate 3D super-resolution microscopy requires precise single-molecule localization. This study reveals and corrects field-dependent aberrations in 3D single-molecule imaging, improving nanoscale accuracy.
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