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Updated: Mar 23, 2026
Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Electrically controllable terahertz square-loop metamaterial based on VO₂ thin film
Jun-Hwan Shin1, Kyung Hyun Park, Han-Cheol Ryu
1THz Photonics Creative Research Center, Electronics and Telecommunications Research Institute, 218 Gajeong-ro, Yuseong-gu, Daejeon 305-700, Korea. School of Advanced Device Technology, University of Science & Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 305-350, Korea.
This study introduces an electrically controlled terahertz metamaterial using vanadium dioxide (VO2) thin films. The novel design acts as a resonator and micro-heater, enabling tunable band-pass filters with high transmittance ratios.
Area of Science:
- Metamaterials and Nanophotonics
- Terahertz (THz) Technology
- Advanced Materials Science
Background:
- Terahertz (THz) frequency regime presents unique opportunities for novel device applications.
- Vanadium dioxide (VO2) exhibits phase transitions with significant changes in optical and electrical properties, making it suitable for tunable devices.
- Electrically controllable metamaterials are highly sought after for active THz components.
Purpose of the Study:
- To propose and demonstrate an electrically controllable square-loop metamaterial operating in the terahertz frequency regime.
- To utilize vanadium dioxide (VO2) thin film for both resonant properties and electrical control of the metamaterial.
- To achieve tunable band-pass characteristics and high transmittance control using electrical bias.
Main Methods:
- Fabrication of a dual-resonant square-loop metamaterial structure using vanadium dioxide (VO2) thin films.
- Characterization of metamaterial properties in the terahertz frequency range.
- Electrical biasing to induce phase transitions in VO2 and modulate terahertz transmittance.
Main Results:
- The proposed metamaterial exhibits band-pass characteristics in the terahertz frequency band.
- Measured Q-factors of 2.22 and 1.61 were achieved for basic and scaled-down structures at 0.44 THz and 1.14 THz, respectively.
- Successful electrical control of transmittance was demonstrated, achieving transmittance on-off ratios exceeding 40 without external heating.
Conclusions:
- An electrically controllable terahertz metamaterial based on VO2 thin films has been successfully designed and demonstrated.
- The integrated resonator and micro-heater functionality of the square-loop structure enables efficient electrical tuning.
- The developed VO2 metamaterial holds potential for high-performance active terahertz filters and sensors.
