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Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism

Yanwei Guan1, Shiqiao Gao2, Haipeng Liu3

  • 1State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, China. guanyanwei2006@163.com.

Sensors (Basel, Switzerland)
|April 7, 2016
PubMed

Keywords:
anchored diamond coupling mechanismcoordinate transformation methodstiffness difference ratiotuning fork gyroscopesvibration sensitivity

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