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Updated: Mar 22, 2026

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Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope.

Bo Yang1,2, Xingjun Wang3,4, Yunpeng Deng5,6

  • 1School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. 101011019@seu.edu.cn.

Sensors (Basel, Switzerland)
|April 13, 2016
PubMed
Summary

This study introduces an improved decoupled dual-mass micro-gyroscope (DDMG) that significantly reduces mechanical coupling errors. Enhanced designs and feedback control suppress quadrature and offset errors, improving gyroscope performance.

Keywords:
decoupled dual-mass micro-gyroscopemechanical coupling errorquadrature error correctionsuppression technology

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Area of Science:

  • MEMS technology
  • Inertial sensors
  • Micro-electromechanical systems (MEMS)

Background:

  • Mechanical coupling errors degrade micro-gyroscope accuracy.
  • Existing decoupled dual-mass micro-gyroscope (DDMG) designs have limitations in error suppression.

Purpose of the Study:

  • To present an improved DDMG structure for enhanced mechanical coupling error suppression.
  • To detail the structural principles and quadrature error suppression mechanisms.
  • To verify the effectiveness of the proposed design through simulation and experimental testing.

Main Methods:

  • Structural modification to decrease the drive decoupled torque moment arm.
  • Integration of quadrature correction electrodes.
  • Finite element analysis (FEA) using ANSYS software for simulation.
  • Fabrication using the deep dry silicon on glass (DDSOG) process.
  • Implementation of feedback control circuits with quadrature control loops.

Main Results:

  • Simulations show substantial suppression of sense frame rotational displacements in the drive mode.
  • Fabricated DDMG chip demonstrates significant error reduction.
  • Quadrature error decreased 9.66-fold, and offset error decreased 6.36-fold compared to the former DDMG.
  • Feedback control reduced bias drift by 20.59-fold and scale factor non-linearity by 2.81-fold (±400°/s range).

Conclusions:

  • The improved DDMG structure effectively suppresses mechanical coupling errors.
  • The integration of quadrature correction electrodes and feedback control significantly enhances gyroscope performance.
  • This technology offers a substantial improvement in micro-gyroscope accuracy and reliability.