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Jian Deng1, Dan Wu2, Kai Wang1

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This study introduces a new phase retrieval method for noisy interferograms. The novel approach significantly reduces errors, offering high precision and robustness against noise in challenging conditions.

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Area of Science:

  • Optical metrology
  • Interferometry
  • Phase retrieval

Background:

  • Accurate phase map retrieval from limited, noisy interferograms with low phase shifts remains a challenge.
  • Existing phase-shifting methods struggle under harsh conditions, leading to significant errors.

Purpose of the Study:

  • To develop a novel phase retrieval method overcoming limitations of existing techniques under harsh conditions.
  • To improve accuracy and robustness in phase map reconstruction from noisy interferometric data.

Main Methods:

  • Constructing a set of connected interferograms using simple addition and subtraction operations.
  • Ensuring a consistent phase-shift interval of π/2 across all subset interferograms.
  • Processing the connected interferograms with conventional methods like Principal Component Analysis (PCA) or Average Intensity Average (AIA).

Main Results:

  • Achieved significant reduction in Root Mean Square (RMS) errors: up to 93.7% compared to PCA and 89.3% compared to AIA.
  • Demonstrated high precision and robustness against noise in phase retrieval.
  • Validated the method's effectiveness through both simulations and experimental results.

Conclusions:

  • The proposed novel method effectively retrieves phase maps from a small set of noisy interferograms with low phase shifts.
  • Offers a precise and robust solution for phase retrieval under challenging conditions.
  • Outperforms conventional PCA and AIA methods in terms of error reduction and reliability.