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High-precision tilt sensor using a folded Mach-Zehnder geometry in-phase and quadrature interferometer.

June Gyu Park, Kyuman Cho

|May 4, 2016

Summary

A novel homodyne interferometer precisely measures target tilt changes. This high-sensitivity tilt sensor achieves excellent performance, unaffected by environmental interference.

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Area of Science:

Optics and Photonics
Metrology
Sensor Technology

Background:

Precise measurement of target tilt is crucial in various scientific and industrial applications.
Existing tilt sensing methods often suffer from environmental interference and limited sensitivity.
Development of high-sensitivity, robust tilt sensors remains an active research area.

Purpose of the Study:

To present a new high-sensitivity homodyne in-phase and quadrature (I/Q) interferometer scheme for measuring target tilt changes.
To design a tilt sensor that is sensitive only to in-plane tilt and minimizes environmental perturbations.
To demonstrate the performance and sensitivity of the developed tilt sensor.

Main Methods:

Utilized a Mach-Zehnder interferometer folded by the target to induce phase change via in-plane tilt.
Implemented an I/Q-demodulation scheme for direct measurement of the induced phase.
Engineered the interferometer to minimize sensitivity to environmental perturbations like vibrations and temperature fluctuations.

Main Results:

The developed tilt sensor demonstrated a high sensitivity of 10 prad/Hz^1/2 at frequencies slightly above 1 Hz.
Achieved an even higher sensitivity of 0.4 prad/Hz^1/2 at frequencies above 30 Hz.
The sensor showed robustness against environmental interferences, maintaining precise tilt measurements.

Conclusions:

The novel homodyne I/Q-interferometer scheme offers a highly sensitive and robust solution for tilt change measurement.
The designed tilt sensor effectively isolates in-plane tilt changes, minimizing cross-sensitivity to other motions.
This technology has potential applications in fields requiring precise angular metrology.