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Published on: August 15, 2014
Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer
Xiaodan Miao1, Xuhan Dai2, Yi Huang3
1College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China. 01120003@sues.edu.cn.
Abstract:
This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3-5 V input voltage and closed in 0.96 ms, which verified the simulation.
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