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Updated: Mar 21, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Compact lensless digital holographic microscopy using a curved mirror for an enlarged working distance
Abstract:
Digital holographic microscopy (DHM) has a wide range of applications from the analysis of microelectronic mechanical systems (MEMS) to the measurement of cells. We intend on making the system more compact to improve the portability of the device. A concave mirror has been presented to be used in a lensless DHM system to effectively enlarge the working distance and at the same time maintain the compact size of the whole system. A theoretical analysis of the phase compensation between the object wave and the wave reflected from curved reference mirrors is given. Experimental demonstrations of the curved reference mirrors used in the DHM system have been obtained to support our idea. This would change the overall size and adaptability of the DHM system and provide a better understanding of the effects of phase reflected off a curved mirror.
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