Dynamic Response Analysis of Microflow Electrochemical Sensors with Two Types of Elastic Membrane

The Molecular Electric Transducer (MET), widely applied for vibration measurement, has excellent sensitivity and dynamic response at low frequencies. The elastic membrane in the MET is a significant factor with an obvious effect on the performance of the MET in the low frequency domain and is the focus of this paper. In simulation experiments, the elastic membrane and the reaction cavity of the MET were analysed in a model based on the multiphysics finite element method. Meanwhile, the effects caused by the elastic membrane elements are verified in this paper. With the numerical simulation and practical experiments, a suitable elastic membrane can be designed for different cavity structures. Thus, the MET can exhibit the best dynamic response characteristics to measure the vibration signals. With the new method presented in this paper, it is possible to develop and optimize the characteristics of the MET effectively, and the dynamic characteristics of the MET can be improved in a thorough and systematic manner.